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Diamond microstructures for optical micro electromechanical systems
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. MATERIALS SCIENCE.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. Materialvetenskap.
1999 (English)In: SENSORS AND ACTUATORS A-PHYSICAL, ISSN 0924-4247, Vol. 78, no 1, 41-47 p.Article in journal (Refereed) Published
Abstract [en]

We have used hot filament chemical vapour deposition (HFCVD) to fabricate diamond microstructure components for optical micro electromechanical systems (MEMS). In order to demonstrate the wide application range for diamond technology we have made componen

Place, publisher, year, edition, pages
1999. Vol. 78, no 1, 41-47 p.
Keyword [en]
diamond; replication; HFCVD; optical MEMS; FABRICATION; TIPS
Identifiers
URN: urn:nbn:se:uu:diva-28690OAI: oai:DiVA.org:uu-28690DiVA: diva2:56586
Note
Addresses: Bjorkman H, Uppsala Univ, Dept Mat Sci, Box 534, SE-75121 Uppsala, Sweden. Uppsala Univ, Dept Mat Sci, SE-75121 Uppsala, Sweden.Available from: 2007-02-28 Created: 2007-02-28 Last updated: 2011-01-14

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