Mechanical considerations in the design of a micromechanical tuneable InP-based WDM filter
1999 (English)In: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN 1057-7157, Vol. 8, no 3, 328-334 p.Article in journal (Other scientific) Published
A FVDM photodetector for fiberoptic communication systems using a wavelengths around 1.55 mu m has earlier been proposed as a tuneable Fabry-Perot interferometer micromachined on InP and integrated with a photodiode, The interferometer consists of a mirro
Place, publisher, year, edition, pages
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC , 1999. Vol. 8, no 3, 328-334 p.
cavity resonator filters; Fabry-Perot resonators; indium compounds; microelectromechanical devices; microsensors; tunable filters; wavelength division multiplexing; FABRY-PEROT FILTER; DETECTOR
IdentifiersURN: urn:nbn:se:uu:diva-28699OAI: oai:DiVA.org:uu-28699DiVA: diva2:56595
Addresses: Greek S, Univ Uppsala, Dept Mat Sci, S-75121 Uppsala, Sweden. Univ Uppsala, Dept Mat Sci, S-75121 Uppsala, Sweden.2008-10-172008-10-172011-01-14