The strength of surface micromachined indium phosphide devices evaluated by Weibull analysis of tensile and bending tests
1999 (English)In: SENSORS AND MATERIALS, ISSN 0914-4935, Vol. 11, no 4, 247-256 p.Article in journal (Other scientific) Published
The strength of beams surface micromachined from InP was evaluated by subjecting the beams to bending and tensile tests. The tests were performed with a testing unit mounted on a micromanipulator adapted for an SEM to facilitate in situ testing. The tests
Place, publisher, year, edition, pages
MYU K K , 1999. Vol. 11, no 4, 247-256 p.
tensile strength; bending strength; indium phosphide; Weibull statistics; reactive ion etch
IdentifiersURN: urn:nbn:se:uu:diva-28703OAI: oai:DiVA.org:uu-28703DiVA: diva2:56599
Addresses: Uppsala Univ, Dept Mat Sci, SE-75121 Uppsala, Sweden. Ecole Cent Lyon, LEAME, UMR CNRS 5512, F-69131 Ecully, France.2008-10-172008-10-172011-01-14