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The strength of surface micromachined indium phosphide devices evaluated by Weibull analysis of tensile and bending tests
Uppsala University.
Uppsala University.
Uppsala University.
Uppsala University.
1999 (English)In: SENSORS AND MATERIALS, ISSN 0914-4935, Vol. 11, no 4, 247-256 p.Article in journal (Other scientific) Published
Abstract [en]

The strength of beams surface micromachined from InP was evaluated by subjecting the beams to bending and tensile tests. The tests were performed with a testing unit mounted on a micromanipulator adapted for an SEM to facilitate in situ testing. The tests

Place, publisher, year, edition, pages
MYU K K , 1999. Vol. 11, no 4, 247-256 p.
Keyword [en]
tensile strength; bending strength; indium phosphide; Weibull statistics; reactive ion etch
Identifiers
URN: urn:nbn:se:uu:diva-28703OAI: oai:DiVA.org:uu-28703DiVA: diva2:56599
Note
Addresses: Uppsala Univ, Dept Mat Sci, SE-75121 Uppsala, Sweden. Ecole Cent Lyon, LEAME, UMR CNRS 5512, F-69131 Ecully, France.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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