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Microassembly of a piezoelectric miniature motor
Uppsala University.
Uppsala University.
1999 (English)In: JOURNAL OF ELECTROCERAMICS, ISSN 1385-3449, Vol. 3, no 1, 73-83 p.Article in journal (Other scientific) Published
Abstract [en]

An assembly method for the fabrication of a piezoelectric miniature motor is presented. The fabrication is done by placement and soldering of piezoceramic elements onto a silicon substrate. The assembly of the miniature motor demands high precision (+/-5

Place, publisher, year, edition, pages
KLUWER ACADEMIC PUBL , 1999. Vol. 3, no 1, 73-83 p.
Keyword [en]
microassembly; miniature motor; piezomotor; piezoelectric; micropositioning
Identifiers
URN: urn:nbn:se:uu:diva-28707OAI: oai:DiVA.org:uu-28707DiVA: diva2:56603
Note
Addresses: Bexell M, Univ Uppsala, Dept Mat Sci, Box 534, S-75121 Uppsala, Sweden. Univ Uppsala, Dept Mat Sci, S-75121 Uppsala, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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