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Diamond replicas from microstructured silicon masters
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. MATERIALS SCIENCE.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. Materialvetenskap.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. Materialvetenskap.
1999 (English)In: SENSORS AND ACTUATORS A-PHYSICAL, ISSN 0924-4247, Vol. 73, no 1-2, 24-29 p.Article in journal (Refereed) Published
Abstract [en]

We are developing a microstructure technology for thick film diamond replicas, using deposition by hot filament chemical vapour deposition (CVD) on microstructured silicon. This technology is primarily intended to make micromechanical structures for micro

Place, publisher, year, edition, pages
1999. Vol. 73, no 1-2, 24-29 p.
Keyword [en]
diamond; CVD; microstructure; replica; GROWTH; FILMS
Identifiers
URN: urn:nbn:se:uu:diva-28717OAI: oai:DiVA.org:uu-28717DiVA: diva2:56613
Note
Addresses: Bjorkman H, Uppsala Univ, Dept Mat Sci, Box 534, SE-75121 Uppsala, Sweden. Uppsala Univ, Dept Mat Sci, SE-75121 Uppsala, Sweden.Available from: 2007-02-28 Created: 2007-02-28 Last updated: 2011-01-14

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Hjort, Klas

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