uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Micromachining by ion track lithography
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
Physics, Department of Nuclear and Particle Physics.
1999 (English)In: SENSORS AND ACTUATORS A-PHYSICAL, ISSN 0924-4247, Vol. 73, no 1-2, 176-183 p.Article in journal (Refereed) Published
Abstract [en]

Micromachining by ion track etching (MITE) based on the lithographic projection of a mask onto an arbitrary ion track recording material using a parallel beam of highly energetic heavy ions, is described here. By this, deep microstructures have been produ

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 1999. Vol. 73, no 1-2, 176-183 p.
Keyword [en]
micromachining; lithography; etching
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:uu:diva-28718OAI: oai:DiVA.org:uu-28718DiVA: diva2:56614
Note
Addresses: Thornell G, Uppsala Univ, Dept Mat Sci, Box 534, SE-75121 Uppsala, Sweden. Uppsala Univ, Dept Mat Sci, SE-75121 Uppsala, Sweden. Gesell Schwerionenforsch GmbH, GSI, D-64291 Darmstadt, Germany. Uppsala Univ, Dept Radiat Sci, SE-75121 Uppsala, SwAvailable from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

Open Access in DiVA

No full text

By organisation
Department of Materials ScienceDepartment of Nuclear and Particle Physics
Materials Engineering

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 428 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf