uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Microprocessing at the fingertips
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
1998 (English)In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 8, no 4, 251-262 p.Article in journal (Other scientific) Published
Abstract [en]

Microprocessing, or micromachining, is here approached in a broad rather than profound way. Following a short description of its origin in microelectronics is a classification of more recent advances into three-dimensional processing, anisotropy inducing

Place, publisher, year, edition, pages
IOP PUBLISHING LTD , 1998. Vol. 8, no 4, 251-262 p.
Keyword [en]
MICROFABRICATION; DEPOSITION; SILICON
Identifiers
URN: urn:nbn:se:uu:diva-28729OAI: oai:DiVA.org:uu-28729DiVA: diva2:56625
Note
Addresses: Thornell G, Univ Uppsala, Dept Mat Sci, Box 534, S-75121 Uppsala, Sweden. Univ Uppsala, Dept Mat Sci, S-75121 Uppsala, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

Open Access in DiVA

No full text

By organisation
Department of Materials Science

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 385 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf