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Microprocessing at the fingertips
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
1998 (English)In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 8, no 4, 251-262 p.Article in journal (Other scientific) Published
Abstract [en]

Microprocessing, or micromachining, is here approached in a broad rather than profound way. Following a short description of its origin in microelectronics is a classification of more recent advances into three-dimensional processing, anisotropy inducing

Place, publisher, year, edition, pages
IOP PUBLISHING LTD , 1998. Vol. 8, no 4, 251-262 p.
Keyword [en]
URN: urn:nbn:se:uu:diva-28729OAI: oai:DiVA.org:uu-28729DiVA: diva2:56625
Addresses: Thornell G, Univ Uppsala, Dept Mat Sci, Box 534, S-75121 Uppsala, Sweden. Univ Uppsala, Dept Mat Sci, S-75121 Uppsala, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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