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High-rate dual-target DC magnetron sputter deposition of "blue" electrochromic Mo oxide films
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science.
1998 (English)In: SOLAR ENERGY MATERIALS AND SOLAR CELLS, ISSN 0927-0248, Vol. 53, no 3-4, 349-356 p.Article in journal (Refereed) Published
Abstract [en]

Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this "blue" Mo oxide was as high as 1.5 nm/s, to be compared to similar to 0.8

Place, publisher, year, edition, pages
ELSEVIER SCIENCE BV , 1998. Vol. 53, no 3-4, 349-356 p.
Keyword [en]
electrochromism; thin films; sputter deposition; molybdenum oxide; smart windows; OPTICAL-PROPERTIES; MOLYBDENUM OXIDE; TUNGSTEN-OXIDE; THIN-FILMS; NITRIDE; COATINGS; AL
URN: urn:nbn:se:uu:diva-28746OAI: oai:DiVA.org:uu-28746DiVA: diva2:56642
Addresses: Granqvist CG, Univ Uppsala, Dept Mat Sci, POB 534, S-75121 Uppsala, Sweden. Univ Uppsala, Dept Mat Sci, S-75121 Uppsala, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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