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Mechanical and tribological characterization of DC magnetron sputtered tantalum nitride thin films
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/TRIBOMATERIALS.
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1997 (English)In: SURFACE & COATINGS TECHNOLOGY, ISSN 0257-8972, Vol. 97, no 1-3, 779-784 p.Article in journal (Other scientific) Published
Abstract [en]

Tantalum nitride (TaxN1-x) coatings were deposited onto high-speed steel using reactive DC magnetron sputtering. Five different combinations of magnetron power and nitrogen flow were used. Phase analysis (XRD) revealed that the phase composition changes w

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 1997. Vol. 97, no 1-3, 779-784 p.
Keyword [en]
abrasion; hardness; PVD coating; residual stress; tantalum nitride; HARD
URN: urn:nbn:se:uu:diva-28754OAI: oai:DiVA.org:uu-28754DiVA: diva2:56650
Addresses: Westergard R, Uppsala Univ, Div Sci Mat, Dept Technol, Box 534, S-75121 Uppsala, Sweden. Uppsala Univ, Div Sci Mat, Dept Technol, S-75121 Uppsala, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

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