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Micromechanics in optical microsystems - with focus on telecom systems
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
1997 (English)In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 7, no 3, 93-98 p.Article in journal (Refereed) Published
Abstract [en]

As micromachining in semiconductor materials is known to be precise with micrometre or even submicrometre dimension control, it is well suited for building optical microsystems. In this paper the potentials for microstructure technologies (MSTs) are prese

Place, publisher, year, edition, pages
1997. Vol. 7, no 3, 93-98 p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-28764OAI: oai:DiVA.org:uu-28764DiVA: diva2:56660
Note
Addresses: Backlund Y, UNIV UPPSALA, DEPT MAT SCI, BOX 534, S-75121 UPPSALA, SWEDEN.Available from: 2007-03-07 Created: 2007-03-07 Last updated: 2012-06-20

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