Micromechanics in optical microsystems - with focus on telecom systems
1997 (English)In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 7, no 3, 93-98 p.Article in journal (Refereed) Published
As micromachining in semiconductor materials is known to be precise with micrometre or even submicrometre dimension control, it is well suited for building optical microsystems. In this paper the potentials for microstructure technologies (MSTs) are prese
Place, publisher, year, edition, pages
1997. Vol. 7, no 3, 93-98 p.
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:uu:diva-28764OAI: oai:DiVA.org:uu-28764DiVA: diva2:56660
Addresses: Backlund Y, UNIV UPPSALA, DEPT MAT SCI, BOX 534, S-75121 UPPSALA, SWEDEN.2007-03-072007-03-072012-06-20