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Anisotropy-independent through micromachining of quartz resonators by ion track etching
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
1997 (English)In: IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, ISSN 0885-3010, Vol. 44, no 4, 829-838 p.Article in journal (Other scientific) Published
Abstract [en]

A method to achieve deep and crystal cut-independent structuring of arbitrary lateral geometry in single crystalline quartz is demonstrated. It is based on local etching of the latent track-induced anisotropy resulting from heavy ion bombardment, and is c

Place, publisher, year, edition, pages
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC , 1997. Vol. 44, no 4, 829-838 p.
Identifiers
URN: urn:nbn:se:uu:diva-28772OAI: oai:DiVA.org:uu-28772DiVA: diva2:56668
Note
Addresses: Thornell G, UPPSALA UNIV, DIV MAT SCI, MICROMECH PROGRAMME, UPPSALA, SWEDEN. MICRO CRYSTAL, CH-2540 GRENCHEN, SWITZERLAND.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

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