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Nucleation and growth of CVD alpha-Al2O3 on TixOy template
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
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2012 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 207, 254-261 p.Article in journal (Refereed) Published
Abstract [en]

The microstructure, phase and chemical composition of TixOy, templates used to nucleate alpha-Al2O3 on Ti(C,N) coated cemented carbide have been elucidated using scanning electron microscopy, X-ray diffraction, Auger electron spectroscopy and Time-of-Flight Secondary Ion Mass Spectrometry. Further, the adhesive strength of the alpha-Al2O3-TixOy-Ti(C,N) interfaces was investigated using scratch adhesion testing. The present study confirmed that the as-deposited template consisted of a Ti4O7 phase which during subsequent deposition of the Al2O3 layer transformed to a Ti3O5 phase and that the grown Al2O3 layer consisted of 100% alpha-Al2O3. Furthermore, the results showed that the lowest interfacial strength within the multilayer structure was exhibited by the Ti(C,N)-TixOy interface and that the transformation of Ti4O7 to Ti3O5 in the template resulted in formation of pores in the Ti(C,N)-template interface lowering the interfacial strength even more. The use of surface analysis techniques such as Auger electron spectroscopy and especially Time-of-Flight Secondary Ion Mass Spectrometry enabled trace element analyses using depth profiling to characterise the thin interfacial layers in detail. (c) 2012 Elsevier B.V. All rights reserved.

Place, publisher, year, edition, pages
2012. Vol. 207, 254-261 p.
Keyword [en]
CVD, alpha-Al2O3, Nucleation, Template, Adhesion
National Category
Chemical Sciences Inorganic Chemistry
Research subject
Chemistry with specialization in Inorganic Chemistry
URN: urn:nbn:se:uu:diva-184661DOI: 10.1016/j.surfcoat.2012.06.087ISI: 000309501600037OAI: oai:DiVA.org:uu-184661DiVA: diva2:567122
Available from: 2012-11-12 Created: 2012-11-12 Last updated: 2013-01-08Bibliographically approved

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Ottosson, Mikael
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