Parametric Study of Thin-film Zero-Group Velocity Resonators
2012 (English)In: 2012 IEEE International Utrasonics Symposium (IUS), 2012, 307-310 p.Conference paper (Refereed)
Here we demonstrate experimentally a novel, small form factor, resonant architecture employing the intrinsic zero-group-velocity dispersion of the first order symmetric Lamb wave S1 propagating in piezoelectric AlN film membranes. Designs with different topologies were fabricated and compared. FEM analysis is used to verify the observed differences while providing a deeper insight to the resonator performance. Technique for improvement of the device performance are further proposed.
Place, publisher, year, edition, pages
2012. 307-310 p.
, IEEE International Ultrasonics Symposium
AlN; Lamb Wave; Resonator; Thin Film
Engineering and Technology
Research subject Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-185257DOI: 10.1109/ULTSYM.2012.0075ISI: 000326960200067ISBN: 978-146734561-3OAI: oai:DiVA.org:uu-185257DiVA: diva2:571087
IEEE International Ultrasonics Symposium, IUS, Oct 7-10, 2013, Dresden, Germany
FunderSwedish Research Council, 2009-5056