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Parametric Study of Thin-film Zero-Group Velocity Resonators
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
Technical University of Sofia.
Technical University of Sofia.
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2012 (English)In: 2012 IEEE International Utrasonics Symposium (IUS), 2012, 307-310 p.Conference paper, Published paper (Refereed)
Abstract [en]

Here we demonstrate experimentally a novel, small form factor, resonant architecture employing the intrinsic zero-group-velocity dispersion of the first order symmetric Lamb wave S1 propagating in piezoelectric AlN film membranes. Designs with different topologies were fabricated and compared. FEM analysis is used to verify the observed differences while providing a deeper insight to the resonator performance. Technique for improvement of the device performance are further proposed.

Place, publisher, year, edition, pages
2012. 307-310 p.
Series
IEEE International Ultrasonics Symposium
Keyword [en]
AlN; Lamb Wave; Resonator; Thin Film
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-185257DOI: 10.1109/ULTSYM.2012.0075ISI: 000326960200067ISBN: 978-146734561-3 (print)OAI: oai:DiVA.org:uu-185257DiVA: diva2:571087
Conference
IEEE International Ultrasonics Symposium, IUS, Oct 7-10, 2013, Dresden, Germany
Funder
Swedish Research Council, 2009-5056
Available from: 2012-11-21 Created: 2012-11-21 Last updated: 2014-01-05Bibliographically approved

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Yantchev, VentsislavArapan, LilianKatardjiev, Ilia

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