High-temperature zirconia microthruster with integrated flow sensor
2013 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 23, no 5, 055004- p.Article in journal (Refereed) Published
This paper describes the design, fabrication and characterization of a ceramic, heated cold-gas microthruster device made with silicon tools and high temperature co-fired ceramic processing. The device contains two opposing thrusters, each with an integrated calorimetric propellant flow sensor and a heater in the stagnation chamber of the nozzle. The exhaust from a thruster was photographed using schlieren imaging to study its behavior and search for leaks. The heater elements were tested under a cyclic thermal load and to the maximum power before failure. The nozzle heater was shown to improve the efficiency of the thruster by 6.9%, from a specific impulse of 66 to 71 s, as calculated from a decrease of the flow rate through the nozzle of 13%, from 44.9 to 39.2 sccm. The sensitivity of the integrated flow sensor was measured to 0.15 m Omega sccm(-1) in the region of 0-15 sccm and to 0.04 m Omega sccm(-1) above 20 sccm, with a zero-flow sensitivity of 0.27 m Omega sccm(-1). The choice of yttria-stabilized zirconia as a material for the devices makes them robust and capable of surviving temperatures locally exceeding 1000 degrees C.
Place, publisher, year, edition, pages
2013. Vol. 23, no 5, 055004- p.
Keywords: Zirconia, YSZ, HTCC, schlieren imaging, flow sensor, microthruster
Other Engineering and Technologies not elsewhere specified
Research subject Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-186257DOI: 10.1088/0960-1317/23/5/055004ISI: 000317739100004OAI: oai:DiVA.org:uu-186257DiVA: diva2:572769