Fabrication and evaluation of a free molecule micro-resistojet with thick silicon dioxide insulation and suspension
2013 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 23, no 6, 065006- p.Article in journal (Refereed) Published
A silicon free molecule micro-resistojet (FMMR) with a thermally insulating suspension frame composed of silicon dioxide has been designed, fabricated and tested. The concept was developed to increase the efficiency of FMMRs, especially in silicon-based integrated systems. Fabrication of the thick insulating frame was performed through oxidation of high-aspect ratio silicon trenches. The thermal properties of the 1 cm(2) thruster were evaluated using an IR camera, and it was found that when the volume inside the frame is heated more than 200 degrees C using integrated nickel heaters, the temperature increase in the volume outside the frame is less than 50 degrees C. During operation in vacuum, the thrust range was calculated to be about 13-1070 mu N and the maximum specific impulse 54 s. At maximum thrust, and a power consumption of 1.6 W, the total efficiency of the thruster was 17%. Designs of more efficient and versatile systems are discussed.
Place, publisher, year, edition, pages
2013. Vol. 23, no 6, 065006- p.
Engineering and Technology
Research subject Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-186775DOI: 10.1088/0960-1317/23/6/065006ISI: 000319451300006OAI: oai:DiVA.org:uu-186775DiVA: diva2:572904