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A Test Facility for micro Machining and Other Applications of Ion-assisted Etching Technology
Uppsala University, Interfaculty Units, The Svedberg Laboratory.
Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science.
Physics, Department of Physics.
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1996 (English)In: Abstract Book of the Tenth Int. Conf.on Thin Films, 1996Conference paper (Other scientific)
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Materials Engineering
URN: urn:nbn:se:uu:diva-30432OAI: oai:DiVA.org:uu-30432DiVA: diva2:58328
Available from: 2007-02-14 Created: 2007-02-14

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Westerberg, LarsNilsson, LeifZiemann, VolkerHjort, KlasGranqvist, Claes-GöranNordgren, Joseph
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The Svedberg LaboratoryDepartment of Materials ScienceDepartment of Physics
Materials Engineering

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