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Study of oxidation kinetics for metal-dielectric films using IR optical measurements
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science.
1997 (English)In: Proc SPIEArticle in journal (Refereed) Published
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URN: urn:nbn:se:uu:diva-31318OAI: oai:DiVA.org:uu-31318DiVA: diva2:59214
Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

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