Inclined surfaces in diamond: broadband antireflective structures and coupling light through waveguides
2013 (English)In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 21, no 3, 2693-2700 p.Article in journal (Refereed) Published
Control of the sidewall angle of diamond microstructures was achieved by varying the gas mixture, bias power and mask shape during inductively coupled plasma etching. Different etch mechanisms were responsible for the angle of the lower and upper part of the sidewall formed during diamond etching. These angles could to some extent be controlled separately. The developed etch process was used to fabricate wideband antireflective structures with an average transmission of 96.4% for wavelengths between 10 and 50 mu m. Smooth facetted edges for coupling light through waveguides from above were also demonstrated.
Place, publisher, year, edition, pages
2013. Vol. 21, no 3, 2693-2700 p.
diamond, etching, waveguide, antireflection
Manufacturing, Surface and Joining Technology Other Physics Topics
Research subject Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-192566DOI: 10.1364/OE.21.002693ISI: 000315991400015OAI: oai:DiVA.org:uu-192566DiVA: diva2:599981