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Inclined surfaces in diamond: broadband antireflective structures and coupling light through waveguides
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
2013 (English)In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 21, no 3, 2693-2700 p.Article in journal (Refereed) Published
Abstract [en]

 Control of the sidewall angle of diamond microstructures was achieved by varying the gas mixture, bias power and mask shape during inductively coupled plasma etching. Different etch mechanisms were responsible for the angle of the lower and upper part of the sidewall formed during diamond etching. These angles could to some extent be controlled separately. The developed etch process was used to fabricate wideband antireflective structures with an average transmission of 96.4% for wavelengths between 10 and 50 mu m. Smooth facetted edges for coupling light through waveguides from above were also demonstrated. 

Place, publisher, year, edition, pages
2013. Vol. 21, no 3, 2693-2700 p.
Keyword [sv]
diamond, etching, waveguide, antireflection
National Category
Manufacturing, Surface and Joining Technology Other Physics Topics
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-192566DOI: 10.1364/OE.21.002693ISI: 000315991400015OAI: oai:DiVA.org:uu-192566DiVA: diva2:599981
Available from: 2013-01-22 Created: 2013-01-22 Last updated: 2017-12-06
In thesis
1. Diamond Microfabrication for Applications in Optics and Chemical Sensing
Open this publication in new window or tab >>Diamond Microfabrication for Applications in Optics and Chemical Sensing
2013 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Diamond is a material with many exceptional properties. In this thesis methods for fabrication of microstructures as well as several applications of such structures in optics, microfluidics and electrochemistry are presented.

A method for etching deep and highly precise gratings is described. This method was used to fabricate circularly symmetric half wave plates for use in vector vortex coronagraphs. Such coronagraphs are a very promising approach to the direct imaging of extrasolar planets.

By varying the lateral etch rate of the aluminum mask during diamond etching in an inductively coupled plasma, the sidewall angle of the etched structures could be controlled. This method was used to make smooth sloped sides on a waveguide for coupling light into it. Antireflective structures that drastically reduced the surface reflection in a wavelength band between 10 and 50 µm were also fabricated.

An array of boron doped diamond microelectrodes for electrochemical measurements in a microchannel was fabricated and tested, showing very good stability and reusability. Several hundred hours of use did not adversely affect their performance and no damage to them could be detected by atomic force microscopy or scanning electron microscopy.

Superhydrophobic surfaces in diamond were demonstrated, using both hydrogen and fluorine termination. Hydrogen termination on a flat surface gives contact angles below 90°. To achieve a superhydrophobic surface with this low intrinsic hydrophobicity, structures looking like microscopic nail heads were fabricated. The effect of water pressure on immersed superhydrophobic surfaces was also studied and it was found that the collapse of the superhydrophobic state due to pressure was sometimes reversible as the pressure was lowered.

Finally, a method was tested for functionalizing diamond surfaces using block copolymers of polyethylene oxide and polypropylene oxide to both passivate the surface and to attach synthetic binder molecules. This method was found to give very high signal to noise ratios when detecting C-reactive protein.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2013. 65 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1015
Keyword
diamond, microfabrication, microoptics, coronagraph, waveguide, microelectrodes, superhydrophobic
National Category
Manufacturing, Surface and Joining Technology Astronomy, Astrophysics and Cosmology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-192567 (URN)978-91-554-8587-0 (ISBN)
Public defence
2013-03-08, Polacksbacken 2347, Lägerhyddsvägen 2, Uppsala, 10:00 (English)
Opponent
Supervisors
Available from: 2013-02-14 Created: 2013-01-22 Last updated: 2013-04-02

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Forsberg, PontusKarlsson, Mikael

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