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Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides
Plasma & Coatings Physics Division, IFM-Material Physics, Linköpings universitet.
Plasma & Coatings Physics Division, IFM-Material Physics, Linköpings universitet.
Plasma & Coatings Physics Division, IFM-Material Physics, Linköpings universitet.
Plasma & Coatings Physics Division, IFM-Material Physics, Linköpings universitet.
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2012 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2012. 9- p.
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-193734OAI: oai:DiVA.org:uu-193734DiVA: diva2:603481
Conference
Reactive Sputter Deposition 2012, December 13-14, 2012, Het Pand, Gent, Nederländerna
Available from: 2013-02-06 Created: 2013-02-06 Last updated: 2016-04-20

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Kubart, Tomas

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