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A Method for the Determination of the Angular Dependence during Dry Etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
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1996 (English)In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 14, no 5, 3239- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1996. Vol. 14, no 5, 3239- p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-32526DOI: 10.1116/1.588813OAI: oai:DiVA.org:uu-32526DiVA: diva2:60424
Available from: 2007-03-05 Created: 2007-03-05 Last updated: 2017-12-06Bibliographically approved

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Katardjiev, IliaBäcklund, YlvaBerg, SörenBlom, Hans-Olof

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