uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Correlation between interfacial electronic structure and mechanical properties of ZrN/SiNx films
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Materials Theory.
Show others and affiliations
2013 (English)In: Materials letters (General ed.), ISSN 0167-577X, E-ISSN 1873-4979, Vol. 94, 61-64 p.Article in journal (Refereed) Published
Abstract [en]

The ZrN/SiNx double-layers with different density of SiNx layers, which was controlled by applying different substrate bias for depositing SiNx layers, were synthesized for investigating the interfacial electronic structure. Results indicated that the interfacial electrostatic polarization existed as the ZrN and SiNx bond with each other to form a heterojunction, since the electrons donated from ZrN layer to SiNx layer. Moreover, the degree of polarization was affected by the density of SiNx layer. The corresponding ZrN/SiNx multi-layers were deposited for studying the correlation between interfacial electronic structure and mechanical properties. The results of hardness test implied that the interfacial electrostatic polarization would enhance the hardness to a certain extent.

Place, publisher, year, edition, pages
2013. Vol. 94, 61-64 p.
Keyword [en]
Electrostatic polarization, Indentation and hardness, Interface, Thin films, Degree of polarization, Different substrates, Hardness test, Interfacial electronic structure, Deposits, Electrostatics, Hardness, Heterojunctions, Interfaces (materials), Polarization, Electronic structure
National Category
Natural Sciences
URN: urn:nbn:se:uu:diva-194993DOI: 10.1016/j.matlet.2012.12.011ISI: 000315254400017OAI: oai:DiVA.org:uu-194993DiVA: diva2:606917
Available from: 2013-02-21 Created: 2013-02-20 Last updated: 2013-03-26Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Liu, Peng
By organisation
Materials Theory
In the same journal
Materials letters (General ed.)
Natural Sciences

Search outside of DiVA

GoogleGoogle Scholar

Altmetric score

Total: 134 hits
ReferencesLink to record
Permanent link

Direct link