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Surface Roughness of Sputtered ZrO2 Films Studied by Atomic Force Microscopy and Spectroscopic Light Scattering
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science.
1996 (English)In: Phys.Rev.E, Vol. 54, 4021-4026 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1996. Vol. 54, 4021-4026 p.
URN: urn:nbn:se:uu:diva-32834OAI: oai:DiVA.org:uu-32834DiVA: diva2:60732
Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

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