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Surface Roughness in Sputtered Tin Oxide Films Studied by Light Scattering and Atomic Force Microscopy
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science.
1997 (English)In: Proc.SPIE, Vol. 3141, 48-56 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1997. Vol. 3141, 48-56 p.
URN: urn:nbn:se:uu:diva-32857OAI: oai:DiVA.org:uu-32857DiVA: diva2:60755
Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

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