Thin film lamb wave resonators in frequency control and sensing applications: a review
2013 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 23, no 4, 043001- p.Article in journal (Refereed) Published
This work makes an overview of the progress made during the last decade with regard to a novel class of piezoelectric microwave devices employing acoustic Lamb waves in micromachined thin film membranes. This class of devices is referred to as either thin film Lamb wave resonators or piezoelectric contour-mode resonators both employing thin film aluminum nitride membranes. These devices are of interest for applications in both frequency control and sensing. High quality factor Lamb wave resonators exhibiting low noise, low loss and thermally stable performance are demonstrated and their application in high resolution gravimetric and pressure sensors further discussed. A specific emphasis is put on the ability of these devices to operate in contact with liquids. Future research directions are further outlined.
Place, publisher, year, edition, pages
Institute of Physics (IOP), 2013. Vol. 23, no 4, 043001- p.
MEMS, resonator, thin film, sensor, frequency
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-196353DOI: 10.1088/0960-1317/23/4/043001ISI: 000316299900001OAI: oai:DiVA.org:uu-196353DiVA: diva2:609970
ProjectsVR granted "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications "
FunderSwedish Research Council, 2009-5056
TOPICAL REVIEW2013-03-082013-03-082014-02-03Bibliographically approved