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Thin film lamb wave resonators in frequency control and sensing applications: a review
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin films group)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2013 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 23, no 4, 043001- p.Article in journal (Refereed) Published
Abstract [en]

This work makes an overview of the progress made during the last decade with regard to a novel class of piezoelectric microwave devices employing acoustic Lamb waves in micromachined thin film membranes. This class of devices is referred to as either thin film Lamb wave resonators or piezoelectric contour-mode resonators both employing thin film aluminum nitride membranes. These devices are of interest for applications in both frequency control and sensing. High quality factor Lamb wave resonators exhibiting low noise, low loss and thermally stable performance are demonstrated and their application in high resolution gravimetric and pressure sensors further discussed. A specific emphasis is put on the ability of these devices to operate in contact with liquids. Future research directions are further outlined.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2013. Vol. 23, no 4, 043001- p.
Keyword [en]
MEMS, resonator, thin film, sensor, frequency
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-196353DOI: 10.1088/0960-1317/23/4/043001ISI: 000316299900001OAI: oai:DiVA.org:uu-196353DiVA: diva2:609970
Projects
VR granted "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications "
Funder
Swedish Research Council, 2009-5056
Note

TOPICAL REVIEW

Available from: 2013-03-08 Created: 2013-03-08 Last updated: 2017-12-06Bibliographically approved

Open Access in DiVA

No full text

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Publisher's full texthttp://stacks.iop.org/0960-1317/23/043001

Authority records BETA

Yantchev, VentsislavKatardjiev, Ilia

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