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Thin Film Lamb Wave Resonant Topologies for Frequency Controland Sensing Applications
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films and Piezo-MEMS)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films and Piezo-MEMS)
2012 (English)In: 2012 Int. Symposium on Acoustic Wave devices forĀ  Future Mobile Communications / [ed] K. Hashimoto, 2012, 165-170 p.Conference paper, Published paper (Refereed)
Abstract [en]

Here we present three different thin-film Lamb waveresonant topologies employing reflection, zero-group velocity andintermode coupling respectively in view of energy confinement ofLamb waves propagating in c-textured thin aluminum nitridemembrane. The lowest order symmetric (S0) Lamb wavetopologies with both Bragg and edge reflection have beenextensively studied during the last decade. The other two types ofresonant topologies have been recently introduced for the firsttime and their potential is yet to be realized. The Zero-Group-Velocity Lamb wave resonator employs the native zero-groupvelocitycondition of the first order symmetric (S1) Lamb wave,eliminating thus the need of reflectors of any type. Theintermode-coupled Lamb wave resonator, on the other hand,employs refraction instead of reflection in order to couple thelaterally propagating S0 Lamb wave to the fundamentalthickness shear resonance of the plate (i.e the first orderasymmetric Lamb wave (A1) at cut-off).

Place, publisher, year, edition, pages
2012. 165-170 p.
Keyword [en]
Lamb wave, Resonators, Telecom, Sensor
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-196695OAI: oai:DiVA.org:uu-196695DiVA: diva2:610806
Conference
2012 Int. Symposium on Acoustic Wave devices for Future Mobile Communications, Chiba, Japan
Projects
VR granted "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications"
Funder
Swedish Research Council, 2009-5056
Note

Symposium organizwd by The 150th Committee on Acoustic Wave Device Technologyof the Japan Society for the Promotion of Science (JSPS)

Available from: 2013-03-13 Created: 2013-03-13 Last updated: 2016-04-20

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Yantchev, VentsislavKatardjiev, Ilia

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