Thin Film Lamb Wave Resonant Topologies for Frequency Controland Sensing Applications
2012 (English)In: 2012 Int. Symposium on Acoustic Wave devices for Future Mobile Communications / [ed] K. Hashimoto, 2012, 165-170 p.Conference paper (Refereed)
Here we present three different thin-film Lamb waveresonant topologies employing reflection, zero-group velocity andintermode coupling respectively in view of energy confinement ofLamb waves propagating in c-textured thin aluminum nitridemembrane. The lowest order symmetric (S0) Lamb wavetopologies with both Bragg and edge reflection have beenextensively studied during the last decade. The other two types ofresonant topologies have been recently introduced for the firsttime and their potential is yet to be realized. The Zero-Group-Velocity Lamb wave resonator employs the native zero-groupvelocitycondition of the first order symmetric (S1) Lamb wave,eliminating thus the need of reflectors of any type. Theintermode-coupled Lamb wave resonator, on the other hand,employs refraction instead of reflection in order to couple thelaterally propagating S0 Lamb wave to the fundamentalthickness shear resonance of the plate (i.e the first orderasymmetric Lamb wave (A1) at cut-off).
Place, publisher, year, edition, pages
2012. 165-170 p.
Lamb wave, Resonators, Telecom, Sensor
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-196695OAI: oai:DiVA.org:uu-196695DiVA: diva2:610806
2012 Int. Symposium on Acoustic Wave devices for Future Mobile Communications, Chiba, Japan
ProjectsVR granted "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications"
FunderSwedish Research Council, 2009-5056
Symposium organizwd by The 150th Committee on Acoustic Wave Device Technologyof the Japan Society for the Promotion of Science (JSPS)2013-03-132013-03-132016-04-20