Thick Self-Ordered Nanoporous Ta2O5 Films with Long-Range Lateral Order
2009 (English)In: Journal of The Electrochemical Society, Vol. 156, no 6, K104-K109 p.Article in journal (Refereed) Published
In this work we report the anodic formation of highly ordered nanoporous Ta2O5 layers that exhibit a self-ordered alignment of pores uniformly over the anodized surface. These layers are grown by anodization of tantalum in a nonaqueous electrolyte consisting of an optimized glycerol/ethylene glycol mixture with the addition of NH4F . To reach an optimized nanoporous structure, several factors [fluoride concentration and content of supporting electrolyte (NH4)2SO4 ] need to be controlled. Once optimized, the nanopore diameter can be adjusted using the applied voltage in the range of 7–18 nm, and layers with a thickness of more than 10μm can be grown. As a result, a pore aspect ratio of 1000 can be reached.
Place, publisher, year, edition, pages
2009. Vol. 156, no 6, K104-K109 p.
IdentifiersURN: urn:nbn:se:uu:diva-198881DOI: 10.1149/1.3116243OAI: oai:DiVA.org:uu-198881DiVA: diva2:618425