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Millimeter-Wave RF-MEMS SPDT Switch Networks in a SiGe BiCMOS Process Technology
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2012 (English)In: European Microwave Integrated Circuits Conference - Proceedings, NEW YORK: IEEE , 2012, 691-694 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents mm-wave capacitive RF-MEMS based Single-Pole-Double-Throw (SPDT) switches fabricated in a SiGe BiCMOS process technology. Three different SiGe RF-MEMS based SPDTs (targeting the 40-80 GHz range) present 3-4 dB of in-band losses and up to 20-25 dB of isolation, respectively. The measured in-band attenuation of the characterized SiGe MEMS SPDTs corresponds to a loss of 2-3 dB when close to 1 dB of combined losses within the RF pads has been removed. The experimental s-parameter data was obtained from RF-tests of more than 300 characterized SPDT switch networks indicating a high fabrication yield and process repeatability of the fabricated SiGe MEMS circuits. The validated SiGe MEMS switch circuits can enable single-chip reconfigurable ICs for wireless communication and sensing applications up to 100 GHz.

Place, publisher, year, edition, pages
NEW YORK: IEEE , 2012. 691-694 p.
Series
European Microwave Integrated Circuits Conference
Keyword [en]
Millimeter-wave, radio frequency microelectromechanical systems, silicon germanium, switches
National Category
Natural Sciences Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-202482ISI: 000318630900174ISBN: 978-2-87487-028-6 (print)OAI: oai:DiVA.org:uu-202482DiVA: diva2:634658
Conference
The 7th European Microwave Integrated Circuits (EuMIC) Conference,29 and 30 October, 2012, Amsterdam, The Netherlands
Available from: 2013-07-01 Created: 2013-06-24 Last updated: 2015-01-07Bibliographically approved

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Reyaz, Shakila BintMalmqvist, RobertRydberg, Anders

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