Kinetic Considerations of Gas-Phase Adsorption of Growth Species on the c-BN(100) Surface
2014 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 564, 246-252 p.Article in journal (Refereed) Published
The cubic phase of boron nitride (c-BN) is an extremely promising multifunctional material. However, to exploit all possible applications, a successful route for large area chemical vapor deposition (CVD) of c-BN films is required. Adsorption of gaseous growth species onto the c-BN surface is one of the key elementary reactions in CVD growth of c-BN. In the present study, adsorption of BHx, BFx, and NHx species (x = 0, 1, 2, 3) onto the B- and N-terminated c-BN(100) surfaces has been investigated using density functional theory (DFT) calculations. It was found that adsorption of BHx is an activation less process.
Place, publisher, year, edition, pages
2014. Vol. 564, 246-252 p.
IdentifiersURN: urn:nbn:se:uu:diva-203233DOI: 10.1016/j.tsf.2014.05.013ISI: 000340852200033OAI: oai:DiVA.org:uu-203233DiVA: diva2:635804