Analysis of two dimensional composite surface grating structures with applications to low loss microacoustic resonators
2013 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 114, no 7, 074902- p.Article in journal (Refereed) Published
2D composite grating building blocks with hexagonal symmetry are proposed and analyzed asefficient reflectors and transducers in the design of low loss surface acoustic wave (SAW) resonators. Eigen-frequency and frequency response finite element analyses are used to study the propagation and excitation characteristics of SAWs in the 2D composite structures. The proposed structures have the advantage of being compatible with the planar SAW technology, while introducing design principles reminiscent to the semiconductor devices. More specifically, thefrequency bandgap characteristics of the various resonator building blocks can be adjusted so that losses related to the SAW diffraction, impedance mismatch, and parasitic SAW radiation from theelectrical contacts can be suppressed. Three distinct types SAW resonant topologies employing 2D gratings are deduced from the analytical results.
Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2013. Vol. 114, no 7, 074902- p.
Phononic, Gratings, Building blocks, Surface Acoustic Waves, Resonators
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Microwave Technology; Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-205592DOI: 10.1063/1.4818476ISI: 000323510900085OAI: oai:DiVA.org:uu-205592DiVA: diva2:642115
ProjectsVR granted "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications"
FunderSwedish Research Council, 2009-5056