Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode
2013 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 23, no 1, 78-91 p.Article in journal (Refereed) Published
The characteristics of one-port aluminum nitride (AlN) Lamb wave resonators utilizing the lowest symmetric (S0) mode with electrically open, grounded, and floating bottom electrode configurations are theoretically and experimentally investigated. The finite element analysis (FEA) is performed to take an insight into the static capacitance characteristics of the AlN Lamb wave resonators with various bottom surface conditions. The theoretical results predict that the floating bottom electrode efficiently reduces the static capacitance in the AlN thin plate and then promotes an efficient improvement in the effective coupling coefficient. Experimentally the AlN Lamb wave resonator without a bottom electrode exhibits a loaded quality factor (Q) as high as 3033 at its series resonance frequency, 948.1 MHz, but a low effective coupling coefficient of 0.18%. On the contrary, the Lamb wave resonator with an electrically floating bottom electrode shows an effective coupling coefficient up to 1.05% but a low loaded Q of 850 at its series resonance frequency, 850.3 MHz. In contrast to the floating bottom electrode, the Lamb wave resonator with an electrically grounded bottom electrode shows a smaller effective coupling coefficient of 0.78% and a similar loaded Q of 800 at the series resonance frequency, 850.5 MHz.
Place, publisher, year, edition, pages
2013. Vol. 23, no 1, 78-91 p.
Thin Film, Resonator, MEMS, Performance
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Microwave Technology; Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-206636DOI: 10.1109/JMEMS.2013.2290793ISI: 000331296200010OAI: oai:DiVA.org:uu-206636DiVA: diva2:644806
ProjectsVR funded " "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications ""
FunderSwedish Research Council, 2009-5056