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Evaluation of a microplasma source based on a stripline split-ring resonator
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)ORCID iD: 0000-0003-0832-1848
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Applied Nuclear Physics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
2013 (English)In: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 22, no 5, 055017- p.Article in journal (Refereed) Published
Abstract [en]

In this paper, a stripline split-ring resonator microwave-induced plasma source, aimed for integration in complex systems, is presented and compared with a traditional microstrip design. Devices based on the two designs are evaluated using a plasma breakdown test setup for measuring the power required to ignite plasmas at different pressures. Moreover, the radiation efficiency of the devices is investigated with a Wheeler cap, and their electromagnetic compatibility is investigated in a variable electrical environment emulating an application. Finally, the basic properties of the plasma in the two designs are investigated in terms of electron temperature, plasma potential and ion density. The study shows that, with a minor increase in plasma ignition power, the stripline design provides a more isolated and easy-to-integrate alternative to the conventional microstrip design. Moreover, the stripline devices showed a decreased antenna efficiency as compared with their microstrip counterparts, which is beneficial for plasma sources. Furthermore, the investigated stripline devices exhibited virtually no frequency shift in a varying electromagnetic environment, whereas the resonance frequency of their microstrip counterparts shifted up to 17.5%. With regard to the plasma parameters, the different designs showed only minor differences in electron temperature, whereas the ion density was higher with the stripline design.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2013. Vol. 22, no 5, 055017- p.
Keyword [en]
Split-ring resonator, Microwave plasma, Microstrip, Stripline, Plasma, Wheeler cap, Langmuir probe
National Category
Other Physics Topics Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Microwave Technology
Identifiers
URN: urn:nbn:se:uu:diva-206792DOI: 10.1088/0963-0252/22/5/055017ISI: 000325246400017OAI: oai:DiVA.org:uu-206792DiVA: diva2:645471
Available from: 2013-09-04 Created: 2013-09-04 Last updated: 2017-12-06Bibliographically approved
In thesis
1. Miniature Plasma Sources for High-Precision Molecular Spectroscopy in Planetary Exploration
Open this publication in new window or tab >>Miniature Plasma Sources for High-Precision Molecular Spectroscopy in Planetary Exploration
2015 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

The prospect of finding life outside Earth has fascinated mankind for ages, and new technology continuously pushes the boundary of how remote and how obscure evidence we can find. Employing smaller, or completely new, types of landers and robots, and equipping them with miniature instruments would indeed revolutionize exploration of other planets and moons.

In this thesis, microsystems technology is used to create a miniature high-precision isotope-resolving molecular spectrometer utilizing the optogalvanic effect. The heart of the instrument, as well as this thesis, is a microplasma source.

The plasma source is a split-ring resonator, chosen for its simplicity, pressure range and easily accessible plasma, and modified to fit the challenging application, e.g., by the adding of an additional ground plane for improved electromagnetic shielding, and the integration of microscopic plasma probes to extract the pristine optogalvanic signal.

Plasma sources of this kind have been manufactured in both printed circuit board and alumina, the latter for its chemical inertness and for compatibility with other devices in a total analysis system. From previous studies, classical optogalvanic spectroscopy (OGS), although being very sensitive, is known to suffer from stability and reproducibility issues. In this thesis several studies were conducted to investigate and improve these shortcomings, and to improve the signal-to-noise ratio. Moreover, extensive work was put into understanding the underlying physics of the technique.

The plasma sources developed here, are the first ever miniature devices to be used in OGS, and exhibits several benefits compared to traditional solutions. Furthermore, it has been confirmed that OGS scales well with miniaturization. For example, the signal strength does not decrease as the volume is reduced like in regular absorption spectroscopy. Moreover, the stability and reproducibility are greatly increased, in some cases as much as by two orders of magnitude, compared with recent studies made on a classical OGS setup. The signal-to-noise ratio has also been greatly improved, e.g., by enclosing the sample cell and by biasing the plasma. Another benefit of a miniature sample cell is the miniscule amount of sample it requires, which can be important in many applications where only small amounts of sample are available.

To conclude: With this work, an important step toward a miniature, yet highly performing, instrument for detection of extraterrestrial life, has been taken.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2015. 53 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1253
Keyword
MEMS, MST, Optogalvanic Spectroscopy, Molecular Spectroscopy, Split-Ring Resonator, Microplasma
National Category
Physical Sciences Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-251315 (URN)978-91-554-9245-8 (ISBN)
Public defence
2015-06-05, Polhemsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 13:15 (English)
Opponent
Supervisors
Available from: 2015-05-11 Created: 2015-04-15 Last updated: 2015-07-07

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Evaluation of a Microplasma Source Based on a Stripline Split-Ring Resonator(556 kB)665 downloads
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Publisher's full texthttp://stacks.iop.org/0963-0252/22/i=5/a=055017

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Berglund, MartinGruden, MathiasThornell, GregerPersson, Anders

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