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Total integrated scattering from transparent substrates in the infrared region: validity of scalar theory
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science.
2000 (English)In: OPTICAL ENGINEERING, ISSN 0091-3286, Vol. 39, no 2, 478-487 p.Article in journal (Refereed) Published
Abstract [en]

Integrated light scattering, from thin, transparent silicon wafers with different front and backside surface roughness is investigated. The measurements are made at near normal incidence in the IR wavelength region 5 to 20 mu m using an integrating sphere

Place, publisher, year, edition, pages
SPIE-INT SOCIETY OPTICAL ENGINEERING , 2000. Vol. 39, no 2, 478-487 p.
Keyword [en]
infrared; integrating sphere; reflectance; roughness; scattering; transmittance; LIGHT-SCATTERING; SURFACE-ROUGHNESS; ENGINEERING SURFACES; OPTICAL-SURFACES; ANGLE
URN: urn:nbn:se:uu:diva-37438OAI: oai:DiVA.org:uu-37438DiVA: diva2:65337
Addresses: Lindstrom T, Uppsala Univ, Angstrom Lab, Dept Mat Sci, POB 534, SE-75121 Uppsala, Sweden. Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden. ACREO AB, SE-126440 Kista, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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