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X-cut miniature tuning forks realized by ion track lithography
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
2000 (English)In: IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, ISSN 0885-3010, Vol. 47, no 1, 8-15 p.Article in journal (Refereed) Published
Abstract [en]

With the recently developed ion track lithography based on the selective etching, widening, and merging of ion-induced defects collectively resembling a superimposed anisotropy in certain areas as defined by a stencil mask, 39-kHz x-cut miniature tuning f

Place, publisher, year, edition, pages
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC , 2000. Vol. 47, no 1, 8-15 p.
Keyword [en]
QUARTZ
Identifiers
URN: urn:nbn:se:uu:diva-37456OAI: oai:DiVA.org:uu-37456DiVA: diva2:65355
Note
Addresses: Thornell G, Uppsala Univ, Dept Mat Sci, Box 534, SE-75121 Uppsala, Sweden. Uppsala Univ, Dept Mat Sci, SE-75121 Uppsala, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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