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Abrasive capacity of thin film diamond structures
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science.
2001 (English)In: PRECISION MACHINING OF ADVANCED MATERIALS, ISSN 1013-9826, Vol. 196, 141-148 p.Article in journal (Refereed) Published
Abstract [en]

Abrasive diamond structures have been produced with a three-step replication technique. First a mould is created using standard silicon wafer patterning technology. Diamond is then chemical vapor deposited onto the mould surface. The last step is to elect

Place, publisher, year, edition, pages
TRANS TECH PUBLICATIONS LTD , 2001. Vol. 196, 141-148 p.
Keyword [en]
abrasion; ceramic; diamond; grinding; microstructuring; pin-on-disc; thin film; wear rate
URN: urn:nbn:se:uu:diva-37464OAI: oai:DiVA.org:uu-37464DiVA: diva2:65363
Addresses: Andersson J, Angstrom Lab, Dept Mat Sci, POB 534, SE-75121 Uppsala, Sweden. Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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