Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering
2001 (English)In: WEAR, ISSN 0043-1648, Vol. 248, no 1-2, 55-64 p.Article in journal (Refereed) Published
The hardness, elasticity, wear rate and friction coefficient of carbon nitride (CNx) films of defined microstructure and composition are presented. CNx films were deposited by de reactive magnetron sputtering from a C target in N-2/Ar plasma. Films were g
Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2001. Vol. 248, no 1-2, 55-64 p.
mechanical properties; tribological properties; magnetron sputtering; CARBON NITRIDE FILMS; DIAMOND-LIKE CARBON; THIN-FILMS; AMORPHOUS-CARBON; NITROGEN FILMS; RIGID DISKS; COATINGS; OVERCOATS; GROWTH; MEDIA
IdentifiersURN: urn:nbn:se:uu:diva-37471OAI: oai:DiVA.org:uu-37471DiVA: diva2:65370
Addresses: Broitman E, Linkoping Univ, Thin Film Phys Div, Dept Phys, SE-58183 Linkoping, Sweden. Linkoping Univ, Thin Film Phys Div, Dept Phys, SE-58183 Linkoping, Sweden. Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden. Thin Film Elec2008-10-172008-10-172011-01-14