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Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science.
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2001 (English)In: WEAR, ISSN 0043-1648, Vol. 248, no 1-2, 55-64 p.Article in journal (Refereed) Published
Abstract [en]

The hardness, elasticity, wear rate and friction coefficient of carbon nitride (CNx) films of defined microstructure and composition are presented. CNx films were deposited by de reactive magnetron sputtering from a C target in N-2/Ar plasma. Films were g

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2001. Vol. 248, no 1-2, 55-64 p.
Keyword [en]
mechanical properties; tribological properties; magnetron sputtering; CARBON NITRIDE FILMS; DIAMOND-LIKE CARBON; THIN-FILMS; AMORPHOUS-CARBON; NITROGEN FILMS; RIGID DISKS; COATINGS; OVERCOATS; GROWTH; MEDIA
Identifiers
URN: urn:nbn:se:uu:diva-37471OAI: oai:DiVA.org:uu-37471DiVA: diva2:65370
Note
Addresses: Broitman E, Linkoping Univ, Thin Film Phys Div, Dept Phys, SE-58183 Linkoping, Sweden. Linkoping Univ, Thin Film Phys Div, Dept Phys, SE-58183 Linkoping, Sweden. Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden. Thin Film ElecAvailable from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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