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Semiconductor gas sensors based on nanostructured tungsten oxide
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. SOLID STATE PHYSICS.
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2001 (English)In: THIN SOLID FILMS, ISSN 0040-6090, Vol. 391, no 2, 255-260 p.Article in journal (Refereed) Published
Abstract [en]

Semiconductor gas sensors based on nanocrystalline WO3 films were produced by two different methods. Advanced reactive gas evaporation was used in both cases either for a direct deposition of films (deposited films) or to produce ultra fine WO3 powder whi

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2001. Vol. 391, no 2, 255-260 p.
Keyword [en]
tungsten oxide; gas deposition nanocrystalline; H2S sensing; gas sensor; THICK-FILM; NITROGEN-OXIDES; SENSITIVITY
Identifiers
URN: urn:nbn:se:uu:diva-37518OAI: oai:DiVA.org:uu-37518DiVA: diva2:65417
Note
Addresses: Lantto V, Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland. Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland. Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden. Univ Nacl Ingn, Fac Ciencias, Lima, PeAvailable from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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