Semiconductor gas sensors based on nanostructured tungsten oxide
2001 (English)In: THIN SOLID FILMS, ISSN 0040-6090, Vol. 391, no 2, 255-260 p.Article in journal (Refereed) Published
Semiconductor gas sensors based on nanocrystalline WO3 films were produced by two different methods. Advanced reactive gas evaporation was used in both cases either for a direct deposition of films (deposited films) or to produce ultra fine WO3 powder whi
Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2001. Vol. 391, no 2, 255-260 p.
tungsten oxide; gas deposition nanocrystalline; H2S sensing; gas sensor; THICK-FILM; NITROGEN-OXIDES; SENSITIVITY
IdentifiersURN: urn:nbn:se:uu:diva-37518OAI: oai:DiVA.org:uu-37518DiVA: diva2:65417
Addresses: Lantto V, Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland. Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland. Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden. Univ Nacl Ingn, Fac Ciencias, Lima, Pe2008-10-172008-10-172011-01-14