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Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide
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2001 (English)In: J. Crystal Growth, Vol. 231, 262- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2001. Vol. 231, 262- p.
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Inorganic Chemistry
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URN: urn:nbn:se:uu:diva-39231OAI: oai:DiVA.org:uu-39231DiVA: diva2:67130
Available from: 2005-10-19 Created: 2005-10-19 Last updated: 2011-01-14

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Hårsta, Anders

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