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Dielectric properties of zirconium oxide grown by atomic layer deposition from iodide precursors
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2001 (English)In: J. Electrochem. Soc., Vol. 148, F227- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2001. Vol. 148, F227- p.
National Category
Inorganic Chemistry
URN: urn:nbn:se:uu:diva-39236OAI: oai:DiVA.org:uu-39236DiVA: diva2:67135
Available from: 2005-10-19 Created: 2005-10-19 Last updated: 2011-01-14

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Hårsta, A
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Department of Materials ChemistryInorganic Chemistry
Inorganic Chemistry

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