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Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. Physics, Department of Physics and Materials Science, Materials Science. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. Physics, Department of Physics and Materials Science, Materials Science. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. Physics, Department of Physics and Materials Science, Materials Science. Fasta tillståndets elektronik.
Department of Engineering Sciences, Electronics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. Physics, Department of Physics and Materials Science, Materials Science. oorganisk kemi.
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2000 (English)In: J. Vac. Sci. Technol. A, Vol. 18, no 4, 1609-1612 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2000. Vol. 18, no 4, 1609-1612 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-39239OAI: oai:DiVA.org:uu-39239DiVA: diva2:67138
Available from: 2008-09-22 Created: 2008-09-22 Last updated: 2011-01-14

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Katardjiev, IliaHårsta, AndersSmith, UlfBerg, Sören

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