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In situ preparation of Ti-containing Ta2O5 films by halide CVD
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Chemistry.
Department of Materials Chemistry.
2000 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
URN: urn:nbn:se:uu:diva-39246OAI: oai:DiVA.org:uu-39246DiVA: diva2:67145
Available from: 2008-05-21 Created: 2008-05-21

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Hårsta, A
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Department of ChemistryDepartment of Materials Chemistry

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