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Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. Fasta tillståndets elektronik.
Department of Engineering Sciences, Electronics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. oorganisk kemi.
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2001 (English)In: J Vac Sci Technol, Vol. A19, no 5, 2664-2669 p.Article in journal (Refereed) Published
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2001. Vol. A19, no 5, 2664-2669 p.
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Inorganic Chemistry
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URN: urn:nbn:se:uu:diva-39536OAI: oai:DiVA.org:uu-39536DiVA: diva2:67435
Available from: 2008-09-22 Created: 2008-09-22 Last updated: 2011-01-14

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Katardjiev, Ilia VOttosson, MBerg, Sören

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