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Patterning of tantalum pentoxide, a high epsilon material, by inductively coupled plasma etching
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Physics, Department of Physics and Materials Science, Materials Science. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Physics, Department of Physics and Materials Science, Materials Science. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Physics, Department of Physics and Materials Science, Materials Science. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Physics, Department of Physics and Materials Science, Materials Science. Fasta tillståndets elektronik.
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2000 (English)In: J Vac Sci Technol, Vol. B18, no 4, 1906-1910 p.Article in journal (Refereed) Published
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2000. Vol. B18, no 4, 1906-1910 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-39552OAI: oai:DiVA.org:uu-39552DiVA: diva2:67451
Available from: 2008-02-19 Created: 2008-02-19 Last updated: 2011-01-14

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Smith, UlfBlom, Hans-Olof

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