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Oxidation and induced damages in oxygen plasma in situ wafer bonding
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. Materialvetenskap.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Department of Engineering Sciences, Electronics. Materialvetenskap.
2000 (English)In: J Electrochem Soc, Vol. 147, no 7, 2699-2703 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2000. Vol. 147, no 7, 2699-2703 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-39562OAI: oai:DiVA.org:uu-39562DiVA: diva2:67461
Available from: 2007-02-28 Created: 2007-02-28 Last updated: 2011-01-14

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