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Micromachining in Silicon for Passive Alignment of Optical Fibres
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
2000 (English)In: Micro-Opto-Electro-Mechanical Systems, 22-23 May, Glasgow, Scotland, United Kingdom, Proc. of SPIE Vol. 4075, 2000, 118- p.Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2000. 118- p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-39579OAI: oai:DiVA.org:uu-39579DiVA: diva2:67478
Available from: 2007-02-28 Created: 2007-02-28 Last updated: 2012-06-20

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Bäcklund, Ylva

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