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Simulation and dielectric characterization of reactive DC magnetron Co-sputtering of (Ta2O5)1-x(TiO2)x
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Ion Physics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Ion Physics. Jonfysik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Ion Physics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Ion Physics. Fasta tillståndets elektronik.
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2000 (English)In: American Vacuum Society 47th National Symposium 2000 Boston, USA, 2000Conference paper, Published paper (Refereed)
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2000.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-39640OAI: oai:DiVA.org:uu-39640DiVA: diva2:67539
Available from: 2007-02-28 Created: 2007-02-28

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Blom, Hans-OlofPossnert, GöranBerg, Sören

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