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Adaptive fuzzy-logic control in reactive magnetron sputtering process for thin film deposition
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/TRIBOMATERIALS.
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2000 (English)In: 3rd COST 516 Tribology Symposium, , 155-162 p.Conference proceedings (editor) (Other scientific)
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Igartua A; Alberdi A; Eibar, Spain , 2000. , 155-162 p.
URN: urn:nbn:se:uu:diva-39707OAI: oai:DiVA.org:uu-39707DiVA: diva2:67607
Available from: 2008-10-17 Created: 2008-10-17

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