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XPS instrument coupled with ALCVD reactor for investigation of film growth
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
2002 (English)In: J Vac Sci Technol, Vol. A20, no 1, 278-284 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2002. Vol. A20, no 1, 278-284 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-39721OAI: oai:DiVA.org:uu-39721DiVA: diva2:67621
Available from: 2007-02-23 Created: 2007-02-23 Last updated: 2011-01-13

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Stolt, Lars

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