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Transfer of diffractive optical elements into GaAs by use of inductively coupled plasma etching for integration with vertical-cavity surface-emitting lasers
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
2000 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2000. Vol. 41, 120-122 p.
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:uu:diva-39722OAI: oai:DiVA.org:uu-39722DiVA: diva2:67622
Conference
Trends in Optics and Photonics. Diffractive Optics and Micro-Optics. Vol.41. Technical Digest. Postconference Edition, Opt. Soc. America, Washington, DC, USA, June 18-22, 2000, Québec, Canada
Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2016-04-20

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Karlsson, MikaelNikolajeff, Fredrik

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CiteExportLink to record
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