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Deep ion projection lithography in PMMA: Substrate heating and ion energy concerns
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Jonfysik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences.
2000 (English)In: Microsystem Technologies, Vol. 6, 135-140 p.Article in journal (Other scientific) Published
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2000. Vol. 6, 135-140 p.
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URN: urn:nbn:se:uu:diva-39731OAI: oai:DiVA.org:uu-39731DiVA: diva2:67631
Available from: 2005-08-17 Created: 2005-08-17 Last updated: 2011-01-14

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Lindeberg, MPossnert, GHjort, K

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