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Low temperature epitaxial layer transferring using oxygen plasma wafer bonding
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
2000 (English)In: LEOS 2000, Rio Grande, Puerto Rico, , 852-853 p.Conference proceedings (editor) (Other scientific)
Place, publisher, year, edition, pages
2000. , 852-853 p.
URN: urn:nbn:se:uu:diva-39739OAI: oai:DiVA.org:uu-39739DiVA: diva2:67639
Available from: 2008-10-17 Created: 2008-10-17

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